Design and evaluation of a piezo xy stage

The ROSETTA/MIDAS mission of the Europeans Space Agency (ESA) intends to study the dust collected from the Wirtanen comet using an Atomic Force Microscope (AFM). This instrument utilzes an XY piezoelectric stage to achieve precise positioning in two in-plane orthogonal directions, and a Z actuator to support the needles for the analyses of dust particles in the out-of-plane direction.