Improving dynamic accuracy of closed loop bandwidth of piezo mechanisms with advanced control laws and embedded eddy current position sensors

Fast Steering Mirrors (FSM) play an important role in diverse optical applications for beam stabilization, image sharpening or dynamic beam steering. These applications require the FSM to have a precise response across a large frequency range, thus the need of a dynamic controller. But the controller is ultimately limited, among other factors, by the performance of the sensor: its ability to measure accurately the required physical value and with a sufficient bandwidth. The compact, dynamic and precise embedded Eddy Current Sensors (ECS) developed by Cedrat Technologies, combined with a model-based controller allow a two and a half times improvement on the bandwidth compared to current sensing technology, while being more precise overall.